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SCE 10 Tumbler Plasma System
Control System:
Computer controlled
Keypad data entry and digital display
Gas flow with mass flow controllers
Single gas input
Control System Options:
Additional gas channels
Capacitance manometer
Throttle valve
Nitrogen backfill
Slow pump and particle reduction
Power Requirements:
115VAC 20A 50/60HZ
220VAC optional
115VAC 20A for vacuum on separate feed
Reactor Chamber Aluminium:
Aluminium Basket
Front loading
View port on front door with UV shield
Dimensions:
Standard full height 19" Equipment rack
Vacuum System:
Standard service with all interconnects
RF Power Source:
0-600 Watt, 13.56 MHz (standard)
Forward and reflected power reading
± 3% Power regulation
Optional 300 or 1000 Watt 13.56 MHz supply
Oxygen service
Corrosive service
Mist eliminator
Certain applications may require higher gas through put than standard. Pump needs to be sized accordingly.
Clarification(s) may be sought at info@globesolutionz.com