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SP 604 Quartz Barrel Plasma System
Control System:
PLC - "Touch-Panel" operation
Digital count down timer (hrs, min, sec)
Digital pressure display Gas flow with mass flow controller(s) Single gas input
Single process
Control System Options:
Two program / two gases Data logging
Capacitance manometer
Slow pump and particle reduction Throttle valve
Nitrogen Backfill
Dimensions:
Control Module - 20"W x 7.8"H x 20"D
Chamber Module - 20.4"W x 18.8"H x 36"D
Shipping Weight - 250 lbs Crated weight
Reactor Chamber:
System available with (2) or (4) 4" Dia x 8" Pyrex or Quartz Chambers
Front loading
View port on front door with UV shield
Vacuum System:
23 CFM Standard service with all interconnects Mist Filter
RF Power Source:
0-600 Watt, 13.56 MHz
Forward and reflected power reading 3% power regulation
Optional 300 Watt 13.56 MHz supply Low frequency optional
Vacuum System Options:
Oxygen service
Clarification(s) may be sought at info@globesolutionz.com