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SCE 150 Quartz Barrel Plasma System
Control System:
Programmable logic controller
Digital count down timer (hrs, min, sec)
Digital pressure display Gas flow with mass flow controllers
Single gas input
Single process
Control System Options:
Nitrogen backfill
Data logging
Slow pump and particle reduction Throttle valve
Dimensions:
Control Module - 20" W x 7.8" H x 20" D
Chamber Module - 20.4" W x 18.8" H x 36" D
Shipping Weight - 250 lbs Crated Weight
Reactor Chamber:
Quartz chamber 10" dia x 18"L
Front loading
View port on front door with UV shield
9" x 16" planar electrode
Front to back gas laminar gas flow for +/- 11 nm uniformity
Vacuum System:
14.7 CFM Standard service with all interconnects, larger pump optional
RF Power Source:
0-300 Watt, 13.56 MHz
Forward and reflected power reading
3% Power regulation
Manual matching network
Vacuum System Options:
Oxygen service
Corrosive service Mist eliminator
Slow pump / particle reduction optional
Power Requirements:
115VAC 15A 50/60HZ
220VAC optional
115VAC 15A for Vacuum on separate feed
Clarification(s) may be sought at info@globesolutionz.com