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SCE 115 Quartz Barrel Plasma System


    Control System:

  1. PLC - "Touch-Panel" operation

  2. Digital display of power, vacuum, gas flow and time

  3. Multiple recipes - on board memory

  4. Password protection

  5. Gas Mass Flow Controllers, (2) 500-sccm

  6. Safety interlock for vacuum and power

    Control System Options:

  1. Additional gas channels - (Up to 3)

  2. Capacitance manometer

  3. Temperature sensor

  4. Throttle valve

    Dimensions:

  1. Standard 30" Equipment rack

  2. 22" W x 36" H x 27" D

  3. Pump 30" L x 12" W x 18" H

  4. Shipping weight - 1000 lbs Crated weight

    Reactor Chamber

  1. 10" x 18" quartz chamber

  2. Front loading

  3. View port on door

  4. Planar plate electrodes - (1 Hot, 1-Ground)


    Reactor Chamber Options:

  1. Water cooled electrode

    RF Power Source:

  1. 0-600 Watt, 13.56 MHz

  2. Forward and reflected power reading

  3. 3% Power regulation

  4. Automatic RF Tuner for load match

    RF Power Options:

  1. 300 Watt, 13.56 MHz

  2. 1000 Watt 13.56 MHz

    Vacuum System:

  1. 23.3 CFM mechanical pump with all interconnects

  2. Oxygen Service - Class "B" preparation

  3. 115 or 208-VAC, 1-phase, 20-Amp

    Vacuum System Options:

  1. Slow pump particle reduction

  2. Fast vent

  3. Chiller / recirculator

  4. Nitrogen back fill

  5. Corrosive service

  6. Mist eliminator