Contact Us:

info@globesolutionz.com


Radio Frequency (RF) Jammers and VIP Convoy Protectors
Speed Displays, Surface Flow Velocity, Railroad Radars and Safety Packages
Nitrogen Laser




Search (Help)






SCE 110 Quartz Barrel Plasma System


    Control System:

  1. PLC - "Touch-Panel" operation

  2. Digital display of power, vacuum, gas flow and time

  3. Gas Mass Flow Controllers (2) 500-sccm

  4. Multiple recipes - on board memory

  5. Password protection

  6. Safety interlock for vacuum and power

  7. 120-VAC, 50/60-Hz, 20-Amp

    Control System Options:

  1. Additional gas channels - (Up to 3)

  2. Capacitance manometer

  3. Temperature sensor

  4. Throttle valve

    RF Power Source:

  1. 0-600 Watt, 13.56 MHz

  2. Forward and reflected power reading

  3. 3% Power regulation

  4. Automatic RF Tuner for load match

    Reactor Chamber

  1. Quartz chamber

  2. 10" dia x 18" L

  3. Front loading

  4. View port on front door with UV shield


    Reactor Chamber Options:

  1. Planar electrode

  2. Quartz trays or rails, (Up to 3 trays)

    Dimensions:

  1. System contained in a standard 19 inch half rack

  2. 36"H x 21"W x 30"D

    Vacuum System:

  1. Electro-pneumatic vacuum valve

  2. 23.3 CFM Standard service with all interconnects

  3. 115 or 208-VAC, 1-phase, 20-Amp

    Vacuum System Options:

  1. Oxygen service

  2. Corrosive service

  3. Nitrogen back fill

  4. Slow Pump particle reduction

  5. Mist eliminator