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SCE 108 Quartz Barrel Plasma System



    Reactor Chamber:

  1. 8" diameter x 8" long quartz chamber

  2. RF shielded

  3. Front load

    Control System:

  1. PLC - "Touch-Panel" operation

  2. Digital count down timer (hrs, min, sec)

  3. Digital On-Screen vacuum display

  4. Gas flow with needle valve control

  5. Manual tuning standard

  6. Automatic RF tuning for load match

    RF Power Source:

  1. 0-150 Watt RF 13.56 MHz supply

  2. Forward and reflected power readings

  3. Option: Low frequency

    Vacuum System

  1. 3.8CFM standard service pump

  2. 1 phase 50/60 120/208 VAC

  3. Package with all interconnecting hardware

  4. Optional: Oxygen service. Class "B" preparation

    Dimensions:

  1. 26"H x 23"W x 30"D

  2. 275 lbs Crated