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SCE 106 Quartz Barrel Plasma System
Reactor Chamber:
6" diameter x 8" long quartz chamber
RF shielded
Front load
Control System:
PLC - "Touch-Panel" operation
Digital count down timer (hrs, min, sec)
On-Screen vacuum display
Gas flow with needle valve control
Manual tuning standard
Automatic tuning optional
RF Power Source:
0-150 Watt RF 13.56 MHz supply
Forward and reflected power readings
Low frequency optional
Vacuum System
3.8 CFM Standard service pump
1 Phase 50/60 120/208 VAC
Package with all interconnecting hardware
Optional: Oxygen service. Class "B" Preparation
Dimensions:
26" H x 23" W x 30" D
275 lbs Crated weight
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