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SCE 30 Aluminium Chamber Plasma System
Reactor Chamber 30" Aluminium:
Shelves can be configured for primary or downstream plasma.
30" Cube aluminium chamber
Multiple shelves (8).
Front loading view port on front door.
Control System:
Siemens S7-200 control package .
PLC based for ease of operation.
"Touch-Panel" interface with digital display.
Process memory on board.
Password protected.
Gas flow with mass flow controller.
Selectable gas correction via S7-200.
Safety interlocks for door, vacuum and power.
RF Power Source:
0-1000 Watt, 13.56 MHz.
Auto-Tune matching network.
Forward and reflected power reading.
Control System Options:
Additional gas channels.
Capacitance manometer.
Temperature sensor.
Throttle valve.
Nitrogen backfill.
Dimensions:
Cabinet 915-mm x 915-mm x 1829-mm (w,d,h)
Pump 30" x 12" x 18" (l,w,h)
Shipping weight 1600 Lbs. crated
Vacuum System
85 CFM mechanical pump
Size dependent upon application
Vaccum System Option:
Oxygen service
Corrosive service
Mist filter
Clarification(s) may be sought at info@globesolutionz.com