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SCE 14 Aluminium Chamber Plasma System
Reactor Chamber 14" Aluminium:
Shelves can be configured for primary or downstream plasma.
14" Cube aluminium chamber.
Multiple shelves (4).
Front loading.
View port on front door with UV shield.
Control System:
Siemens S7-200 control package .
PLC based for ease of operation.
"Touch-Panel" interface with digital display.
Process memory on board.
Password protected.
Gas flow with mass flow controller.
Safety interlocks for door, vacuum and power.
RF Power Source:
0-600 Watt, 13.56 MHz.
Auto-Tune matching network.
Forward and reflected power reading.
3% Power regulation.
Optional: 300 or 1000 Watt 13.56 MHz.
Control System Options:
Additional gas channels.
Capacitance manometer.
Temperature sensor.
Throttle valve.
Nitrogen backfill.
Dimensions:
Cabinet: 559-mm x 686-mm x 915-mm (w,d,h).
Pump 30" L x 12" W x 18" H
Shipping weight, 600 lbs Crated weight.
Vacuum System
23.30 CFM Standard service with all interconnects.
Clarification(s) may be sought at info@globesolutionz.com